Along with the growing demand for industrial control, electric vehicles, and renewable energy generation in recent years, industries require more power devices, expecting higher performance. As a key category of semiconductor components, power devices are designed for power conversion and control under high-voltage/high-current conditions, capable of handling substantial power levels. Key power devices include diodes, transistors, thyristors, metal-oxide-semiconductor field-effect transistors (MOSFETs), insulated gate bipolar transistors (IGBTs), and the latest SiC and GaN power devices.